Interferometric modulator in transmission mode

ABSTRACT

A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.12/368,915, filed Feb. 10, 2009, which claims priority to U.S.Provisional Application Ser. No. 61/034,917, filed Mar. 7, 2008, thecontents of each of which is hereby incorporated by reference in itsentirety.

BACKGROUND

1. Field of the Invention

The field of the invention relates to microelectromechanical systems(“MEMS”).

2. Description of the Related Art

Microelectromechanical systems (MEMS) include micro mechanical elements,actuators, and electronics. Micromechanical elements may be createdusing deposition, etching, and/or other micromachining processes thatetch away parts of substrates and/or deposited material layers or thatadd layers to form electrical and electromechanical devices. One type ofMEMS device is called an interferometric modulator. As used herein, theterm interferometric modulator or interferometric light modulator refersto a device that selectively absorbs and/or reflects light using theprinciples of optical interference. In certain embodiments, aninterferometric modulator may include a pair of conductive plates, oneor both of which may be transparent and/or reflective in whole or partand capable of relative motion upon application of an appropriateelectrical signal. In a particular embodiment, one plate may include astationary layer deposited on a substrate and the other plate mayinclude a movable membrane separated from the stationary layer by an airgap. As described herein in more detail, the position of one plate inrelation to another can change the optical interference of lightincident on the interferometric modulator. Such devices have a widerange of applications, and it would be beneficial in the art to utilizeand/or modify the characteristics of these types of devices so thattheir features can be exploited in improving existing products andcreating new products that have not yet been developed.

SUMMARY OF CERTAIN INVENTIVE ASPECTS

In one aspect a transmissive micromechanical device includes asubstrate, an optical stack over the substrate and a moveable membraneover the optical stack, wherein the moveable membrane includes apartially reflective mirror, and wherein the movable membrane isconfigured to move from a first position to a second position so thatwherein when the movable membrane is in the first position thetransmissive micromechanical device is configured to pass light of apredetermined color and wherein when the movable membrane is in thesecond position, the micromechanical device is configured to blocksubstantially all of light incident on the substrate.

In another aspect a transmissive mechanical device includes a firstoptical stack and a second optical stack selectably separated by a gap,wherein the first optical stack includes a substantially transparentsubstrate, at least one low refractive index layer and at least one highrefractive index layer and wherein the second optical stack includes asubstantially transparent substrate, at least one low refractive indexlayer and at least one high refractive index layer.

In another aspect a transmissive mechanical device includes a firstoptical stack and a second optical stack separated by a gap, wherein thefirst optical stack includes a glass substrate, at least one materialwith an index of refraction greater than 2 and at least one materialwith an index of refraction less than 1.3 and wherein the second opticalstack includes at least one material with an index of refraction greaterthan 2 and at least one material with an index of refraction less than1.3.

In another aspect a transmissive interferometric modulator includes atransparent substrate, a first reflecting surface on the transparentsubstrate and a second reflecting surface disposed on a movable membranesuch that the second reflecting surface and the first reflecting surfaceform a variable optical cavity.

In another aspect a transmissive interferometric modulator (“IMOD”)includes a transparent substrate, a first reflecting surface disposed onthe transparent substrate, a second reflecting surface on a movablemembrane such that the second reflecting surface and the firstreflecting surface form a variable optical cavity, wherein theinterferometric modulator is configured to pass light of a predeterminedcolor with the first reflecting surface disposed in a first position,and a semiconductor layer configured to absorb substantially all visiblelight incident on the substrate with the first reflecting surfacedisposed in a second position.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an isometric view depicting a portion of an exemplaryinterferometric modulator display in which a movable reflective layer ofa first interferometric modulator is in a relaxed position and a movablereflective layer of a second interferometric modulator is in an actuatedposition.

FIG. 2 is a system block diagram illustrating an exemplary electronicdevice incorporating a 3×3 interferometric modulator display.

FIG. 3 is a diagram of movable mirror position versus applied voltagefor one exemplary implementation of an interferometric modulator of FIG.1.

FIG. 4 is an illustration of a set of row and column voltages that maybe used to drive an interferometric modulator display.

FIG. 5A illustrates one exemplary frame of display data in the 3×3interferometric modulator display of FIG. 2.

FIG. 5B illustrates one exemplary timing diagram for row and columnsignals that may be used to write the frame of FIG. 5A.

FIGS. 6A and 6B are system block diagrams illustrating an exemplaryvisual display device comprising a plurality of interferometricmodulators.

FIG. 7A is a cross section of the device of FIG. 1.

FIG. 7B is a cross section of an alternative interferometric modulator.

FIG. 7C is a cross section of another alternative interferometricmodulator.

FIG. 7D is a cross section of yet another alternative interferometricmodulator.

FIG. 7E is a cross section of an additional alternative interferometricmodulator.

FIG. 8 is a diagram of one embodiment of a transmissive interferometricmodulator.

FIG. 9A is a graph illustrating simulated transmittance of theinterferometric modulator of FIG. 8 over a range of wavelengths when theinterferometric modulator is in the bright state.

FIG. 9B is a graph illustrating simulated transmittance of theinterferometric modulator of FIG. 8 over a range of wavelengths when theinterferometric modulator is in the dark state.

FIG. 10 is another embodiment of a transmissive interferometricmodulator that includes two optical stacks separated by an air gap, theoptical stacks each including a substrate layer, a silver layer and anSiO₂ layer.

FIG. 11A is a graph illustrating simulated transmittance of theinterferometric modulator of FIG. 10 when the air gap is approximately3000 Å.

FIG. 11B is a graph illustrating simulated transmittance of theinterferometric modulator of FIG. 10 when the air gap is approximately250 Å.

FIG. 11C is a graph illustrating simulated transmittance of theinterferometric modulator of FIG. 10 when the air gap is approximately150 Å.

FIG. 11D is a color plot illustrating the simulated color spectra forthe embodiment of FIG. 10.

FIG. 12A is a graph illustrating simulated transmittance of theinterferometric modulator of FIG. 10 with a silver thickness of 20 nmwhen the air gap is approximately 3000 Å.

FIG. 12B is a graph illustrating simulated transmittance of theinterferometric modulator of FIG. 10 with a silver thickness of 20 nmwhen the air gap is approximately 250 Å.

FIG. 12C is a graph illustrating simulated transmittance of theinterferometric modulator of FIG. 10 with a silver thickness of 20 nmwhen the air gap is approximately 150 Å.

FIG. 12D is a color plot illustrating the simulated color spectra forthe embodiment of FIG. 10 with a silver thickness of 20 nm.

FIG. 13 is another embodiment of a transmissive interferometricmodulator that includes two optical stacks separated by an air gap, theoptical stacks each including a substrate layer and alternating layersof SiC and MgF₂.

FIG. 14A is a graph illustrating simulated transmittance of theinterferometric modulator of FIG. 13 when the air gap is approximately2000 Å.

FIG. 14B is a graph illustrating simulated transmittance of theinterferometric modulator of FIG. 13 nm when the air gap isapproximately 1000 Å.

FIG. 14C is a graph illustrating simulated transmittance of theinterferometric modulator of FIG. 13 when the air gap is approximately500 Å.

FIG. 14D is a color plot illustrating the simulated color spectra forthe embodiment of FIG. 13.

FIG. 15 is a side view of a transmissive projection system integratingan IMOD device.

FIG. 16 is a top plan view of a transmissive projection systemintegrating three IMOD devices.

FIG. 17 is a top plan view of a reflective projection system integratingan IMOD device.

FIG. 18 is a top plan view of a reflective projection system integratingan IMOD device.

FIG. 19A is an isometric projection view of one type of architectureused in a light combiner.

FIG. 19B is a top view of one type of architecture used in a lightcombiner.

FIG. 19C is a side elevational view of one type of architecture used ina light combiner.

FIG. 19D is a top view of one type of architecture used in a lightcombiner.

FIG. 20 is a cross-section side view of one embodiment of aninterferometric modulator in an architecture similar to thoseillustrated in FIGS. 7A-7E with a dielectric mirror.

FIG. 21 is a cross-section side view of one embodiment of a display withan absorbing black mask on the front and a reflective black mask on theback.

FIG. 22 is a cross-section side view of one embodiment illustrating abacklight including a light-guide plate, an angle turning film, a filmto collimate light and help with recycling, and a reflector.

FIG. 23 illustrates a top plan view of a pixel layout.

DETAILED DESCRIPTION OF CERTAIN EMBODIMENTS

The following detailed description is directed to certain specificembodiments, however, the teachings herein can be applied in a multitudeof different ways. In this description, reference is made to thedrawings wherein like parts are designated with like numeralsthroughout. As will be apparent from the following description, theembodiments may be implemented in any device that is configured todisplay an image, whether in motion (for example, video) or stationary(for example, still image), and whether textual or pictorial. Moreparticularly, it is contemplated that the embodiments may be implementedin or associated with a variety of electronic devices such as, but notlimited to, mobile telephones, wireless devices, personal dataassistants (PDAs), hand-held or portable computers, GPSreceivers/navigators, cameras, MP3 players, camcorders, game consoles,wrist watches, clocks, calculators, television monitors, flat paneldisplays, computer monitors, auto displays (for example, odometerdisplay, etc.), cockpit controls and/or displays, display of cameraviews (for example, display of a rear view camera in a vehicle),electronic photographs, electronic billboards or signs, projectors,architectural structures, packaging, and aesthetic structures (forexample, display of images on a piece of jewelry). MEMS devices ofsimilar structure to those described herein can also be used innon-display applications such as in electronic switching devices.

Certain embodiments as will be described below provide a transmissivebacklit interferometric modulator display. In one embodiment, thebacklit display includes a backlight and an array of transmissiveinterferometric modulators (IMODs). Each interferometric modulatorincludes a fixed optical stack and a movable optical stack. In a relaxedstate the interferometric modulators cause light within the desirewavelength range to be transmitted while reflecting at least a portionof the remaining light. In an actuated state the interferometricmodulators cause substantially all light within the desired wavelengthrange to be absorbed (for example, with a contrast ratio between thetransmission state and the absorbing state of at least 10:1 in someembodiments). Such transmissive IMODs may utilize certain aspects ofreflective IMODs that are described with respect to FIGS. 1-7.

One reflective interferometric modulator (IMOD) display comprisinginterferometric MEMS display elements is illustrated in FIG. 1. In thesedevices, the pixels are in either a bright or dark state. In the bright(“on” or “open”) state, the display element reflects a large portion ofincident visible light to a user. When in the dark (“off” or “closed”)state, the display element reflects little incident visible light to theuser. Depending on the embodiment, the light reflectance properties ofthe “on” and “off” states may be reversed. MEMS pixels can be configuredto reflect predominantly at selected colors, allowing for a colordisplay in addition to black and white.

FIG. 1 is an isometric view depicting two adjacent pixels in a series ofpixels of a visual display, wherein each pixel includes a MEMSinterferometric modulator. In some embodiments, an interferometricmodulator display includes a row/column array of interferometricmodulators, where two such IMODs are of the type depicted in FIG. 1.Each interferometric modulator includes at least a pair of reflectivelayers (or stacks of layers) positioned at a variable and controllabledistance from each other to form a resonant optical gap with at leastone variable dimension. For example, one of the reflective layers may bemoved between two positions. In the first position, referred to hereinas the relaxed position, the movable reflective layer is positioned at arelatively large distance from a fixed partially reflective layer. Inthe second position, referred to herein as the actuated position, themovable reflective layer is positioned more closely adjacent to thepartially reflective fixed layer. Incident light that reflects from thetwo layers interferes constructively or destructively depending on theposition of the movable reflective layer, producing either an overallreflective or non-reflective state for each pixel.

The depicted portion of the pixel array in FIG. 1 includes two adjacentreflective interferometric modulators 12 a and 12 b. In theinterferometric modulator 12 a on the left, a movable reflective layer14 a is illustrated in a relaxed position at a predetermined distancefrom an optical stack 16 a, which includes a partially reflective layer.In the interferometric modulator 12 b on the right, the movablereflective layer 14 b is illustrated in an actuated position adjacent tothe optical stack 16 b.

The optical stacks 16 a and 16 b (collectively referred to as opticalstack 16), as referenced herein, may include several fused layers, whichcan include an electrode layer and one or more optical layers, such asindium tin oxide (ITO), a partially reflective layer, such as chromium(an absorber), and a transparent dielectric. The optical stack 16 isthus electrically conductive and may be fabricated, for example, bydepositing one or more of the above layers onto a transparent substrate20. The partially reflective layers can be formed from a variety ofmaterials that are partially reflective such as various metals,semiconductors, and dielectrics. The partially reflective layer can beformed of one or more layers of materials, and each of the layers can beformed of a single material or a combination of materials.

The layers of the optical stack 16 may be patterned into parallelstrips, and may form row electrodes in a display device as describedfurther below. The movable reflective layers 14 a, 14 b may be formed asa series of parallel strips of a deposited metal layer or layers(orthogonal to the row electrodes of 16 a, 16 b) deposited on top ofposts 18 and an intervening sacrificial material deposited between theposts 18. When the sacrificial material is etched away, the movablereflective layers 14 a, 14 b are separated from the optical stacks 16 a,16 b by a defined gap 19. A highly conductive and reflective materialsuch as aluminum may be used for the reflective layers 14, and thesestrips may form column electrodes in a display device.

With no applied voltage, the gap 19 remains between the movablereflective layer 14 a and optical stack 16 a, with the movablereflective layer 14 a in a mechanically relaxed state, as illustrated bythe pixel 12 a in FIG. 1. However, when a potential difference isapplied to a selected row and column, the capacitor formed at theintersection of the row and column electrodes at the corresponding pixelbecomes charged, and electrostatic forces pull the electrodes together.If the voltage is high enough, the movable reflective layer 14 isdeformed and is forced against the optical stack 16. A dielectric layer(not illustrated in this Figure) within the optical stack 16 may preventshorting and control the separation distance between layers 14 and 16,as illustrated by pixel 12 b on the right in FIG. 1. The behavior is thesame regardless of the polarity of the applied potential difference. Inthis way, row/column actuation that can control the reflective vs.non-reflective pixel states is analogous in many ways to that used inconventional LCD and other display technologies.

FIGS. 2 through 5B illustrate one exemplary process and system for usingan array of interferometric modulators in a display application.

FIG. 2 is a system block diagram illustrating one example of anelectronic device that may incorporate aspects of the teachings herein.The electronic device may include a processor 21 which may be anygeneral purpose single- or multi-chip microprocessor such as an ARM,Pentium®, Pentium II®, Pentium III®, Pentium IV®, Pentium® Pro, an 8051,a MIPS®, a Power PC®, an ALPHA®, or any special purpose microprocessorsuch as a digital signal processor, microcontroller, or a programmablegate array. As is conventional in the art, the processor 21 may beconfigured to execute one or more software modules. In addition toexecuting an operating system, the processor may be configured toexecute one or more software applications, including a web browser, atelephone application, an email program, or any other softwareapplication.

In one example, the processor 21 is also configured to communicate withan array driver 22. The array driver 22 may include a row driver circuit24 and a column driver circuit 26 that provide signals to a displayarray or panel 30. The cross section of the array illustrated in FIG. 1is shown by the lines 1-1 in FIG. 2. For MEMS interferometricmodulators, the row/column actuation protocol may take advantage of ahysteresis property of these devices illustrated in FIG. 3. It mayinclude, for example, a 10 volt potential difference to cause a movablelayer to deform from the relaxed state to the actuated state. However,when the voltage is reduced from that value, the movable layer maintainsits state as the voltage drops back below 10 volts. In FIG. 3, themovable layer does not relax completely until the voltage drops below 2volts. Thus, there exists a window of applied voltage, about 3 to 7 V inthe example illustrated in FIG. 3, within which the device is stable ineither the relaxed or actuated state. This is referred to herein as the“hysteresis window” or “stability window.” For a display array havingthe hysteresis characteristics of FIG. 3, the row/column actuationprotocol can be designed such that during row strobing, pixels in thestrobed row that are to be actuated are exposed to a voltage differenceof about 10 volts, and pixels that are to be relaxed are exposed to avoltage difference of close to zero volts. After the strobe, the pixelsare exposed to a steady state voltage difference of about 5 volts suchthat they remain in whatever state the row strobe put them in. Afterbeing written, each pixel sees a potential difference within the“stability window” of 3-7 volts in this example. This feature makes thepixel design illustrated in FIG. 1 stable under the same applied voltageconditions in either an actuated or relaxed pre-existing state. Sinceeach pixel of the interferometric modulator, whether in the actuated orrelaxed state, can be considered as a capacitor formed by the fixed andmoving reflective layers, this stable state can be held at a voltagewithin the hysteresis window with almost no power dissipation. No (orvery little) current flows into the pixel if the applied potential isfixed.

In some applications, a display frame may be created by asserting theset of column electrodes in accordance with the desired set of actuatedpixels in the first row. A row pulse is then applied to the row 1electrode, actuating the pixels corresponding to the asserted columnlines. The asserted set of column electrodes is then changed tocorrespond to the desired set of actuated pixels in the second row. Apulse is then applied to the row 2 electrode, actuating the appropriatepixels in row 2 in accordance with the asserted column electrodes. Therow 1 pixels are unaffected by the row 2 pulse, and remain in the statethey were set to during the row 1 pulse. This may be repeated for theentire series of rows in a sequential fashion to produce the frame.Generally, the frames are refreshed and/or updated with new display databy continually repeating this process at some desired number of framesper second. A wide variety of protocols for driving row and columnelectrodes of pixel arrays to produce display frames are also well knownand may be used in conjunction with the present invention.

FIGS. 4, 5A, and 5B illustrate one possible actuation protocol forcreating a display frame on the 3×3 array of FIG. 2. FIG. 4 illustratesa possible set of column and row voltage levels that may be used forpixels exhibiting the hysteresis curves of FIG. 3. In FIG. 4, actuatinga pixel involves setting the appropriate column to −V_(bias), and theappropriate row to +ΔV, which may correspond to −5 volts and +5 volts,respectively. Relaxing the pixel is accomplished by setting theappropriate column to +V_(bias), and the appropriate row to the same+ΔV, producing a zero volt potential difference across the pixel. Inthose rows where the row voltage is held at zero volts, the pixels arestable in whatever state they were originally in, regardless of whetherthe column is at +V_(bias), or −V_(bias). As is also illustrated in FIG.4, voltages of opposite polarity than those described above can be used,for example, actuating a pixel can involve setting the appropriatecolumn to +V_(bias), and the appropriate row to −ΔV. In this example,releasing the pixel is accomplished by setting the appropriate column to−V_(bias), and the appropriate row to the same −ΔV, producing a zerovolt potential difference across the pixel.

FIG. 5B is a timing diagram showing a series of row and column signalsapplied to the 3×3 array of FIG. 2 which will result in the displayarrangement illustrated in FIG. 5A, where actuated pixels arenon-reflective. Prior to writing the frame illustrated in FIG. 5A, thepixels can be in any state, and in this example, all the rows are at 0volts, and all the columns are at +5 volts. With these applied voltages,all pixels are stable in their existing actuated or relaxed states.

In the FIG. 5A frame, pixels (1,1), (1,2), (2,2), (3,2) and (3,3) areactuated. To accomplish this, during a “line time” for row 1, columns 1and 2 are set to −5 volts, and column 3 is set to +5 volts. This doesnot change the state of any pixels, because all the pixels remain in the3-7 volt stability window. Row 1 is then strobed with a pulse that goesfrom 0, up to 5 volts, and back to zero. This actuates the (1,1) and(1,2) pixels and relaxes the (1,3) pixel. No other pixels in the arrayare affected. To set row 2 as desired, column 2 is set to −5 volts, andcolumns 1 and 3 are set to +5 volts. The same strobe applied to row 2will then actuate pixel (2,2) and relax pixels (2,1) and (2,3). Again,no other pixels of the array are affected. Row 3 is similarly set bysetting columns 2 and 3 to −5 volts, and column 1 to +5 volts. The row 3strobe sets the row 3 pixels as shown in FIG. 5A. After writing theframe, the row potentials are zero, and the column potentials can remainat either +5 or −5 volts, and the display is then stable in thearrangement of FIG. 5A. The same procedure can be employed for arrays ofdozens or hundreds of rows and columns. The timing, sequence, and levelsof voltages used to perform row and column actuation can be variedwidely within the general principles outlined above, and the aboveexample is exemplary only, and any actuation voltage method can be usedwith the systems and methods described herein.

FIGS. 6A and 6B are system block diagrams illustrating an exemplarydisplay device 40. The display device 40 can be, for example, a cellularor mobile telephone. However, the same components of display device 40or slight variations thereof are also illustrative of various types ofdisplay devices such as televisions and portable media players.

The display device 40 includes a housing 41, a display 30, an antenna43, a speaker 45, an input device 48, and a microphone 46. The housing41 is generally formed from any of a variety of manufacturing processes,including injection molding and vacuum forming. In addition, the housing41 may be made from any of a variety of materials, including, but notlimited to, plastic, metal, glass, rubber, and ceramic, or a combinationthereof. In one embodiment, the housing 41 includes removable portions(not shown) that may be interchanged with other removable portions ofdifferent color, or containing different logos, pictures, or symbols.

The display 30 of exemplary display device 40 may be any of a variety ofdisplays, including a bi-stable display, as described herein. In otherembodiments, the display 30 includes a flat-panel display, such asplasma, EL, OLED, STN LCD, or TFT LCD as described above, or anon-flat-panel display, such as a CRT or other tube device. However, forpurposes of description, the display 30 includes an interferometricmodulator display, as described herein.

The components of exemplary display device 40 are schematicallyillustrated in FIG. 6B. The illustrated exemplary display device 40includes a housing 41 and can include additional components at leastpartially enclosed therein. For example, the exemplary display device 40includes a network interface 27 that includes an antenna 43, which iscoupled to a transceiver 47. The transceiver 47 is connected to aprocessor 21, which is connected to conditioning hardware 52. Theconditioning hardware 52 may be configured to condition a signal (forexample, filter a signal). The conditioning hardware 52 is connected toa speaker 45 and a microphone 46. The processor 21 is also connected toan input device 48 and a driver controller 29. The driver controller 29is coupled to a frame buffer 28 and to an array driver 22, which in turnis coupled to a display array 30. A power supply 50 provides power toall components as included in the particular exemplary display device 40design.

The network interface 27 includes the antenna 43 and the transceiver 47so that the exemplary display device 40 can communicate with one or moredevices over a network. The network interface 27 may also have someprocessing capabilities to relieve requirements of the processor 21. Theantenna 43 is any antenna for transmitting and receiving signals. In oneexample, the antenna transmits and receives RF signals according to theIEEE 802.11 standard, including IEEE 802.11(a), (b), or (g). In anotherexample, the antenna transmits and receives RF signals according to theBLUETOOTH standard. In the case of a cellular telephone, the antenna isdesigned to receive CDMA, GSM, AMPS, or other known signals that areused to communicate within a wireless cell phone network. Thetransceiver 47 pre-processes the signals received from the antenna 43 sothat they may be received by and further manipulated by the processor21. The transceiver 47 also processes signals received from theprocessor 21 so that they may be transmitted from the exemplary displaydevice 40 via the antenna 43.

In an alternative example, the transceiver 47 can be replaced by areceiver. In yet another alternative, network interface 27 can bereplaced by an image source, which can store or generate image data tobe sent to the processor 21. For example, the image source can be adigital video disc (DVD) or a hard-disc drive that contains image data,or a software module that generates image data.

Processor 21 generally controls the overall operation of the exemplarydisplay device 40. The processor 21 receives data, such as compressedimage data from the network interface 27 or an image source, andprocesses the data into raw image data or into a format that is readilyprocessed into raw image data. The processor 21 then sends the processeddata to the driver controller 29 or to frame buffer 28 for storage. Rawdata may refer to the information that identifies the imagecharacteristics at each location within an image. For example, suchimage characteristics can include color, saturation, and gray-scalelevel.

In one example, the processor 21 includes a microcontroller, CPU, orlogic unit to control operation of the exemplary display device 40.Conditioning hardware 52 generally includes amplifiers and filters fortransmitting signals to the speaker 45, and for receiving signals fromthe microphone 46. Conditioning hardware 52 may be discrete componentswithin the exemplary display device 40, or may be incorporated withinthe processor 21 or other components.

The driver controller 29 takes the raw image data generated by theprocessor 21 either directly from the processor 21 or from the framebuffer 28 and reformats the raw image data appropriately for high speedtransmission to the array driver 22. Specifically, the driver controller29 reformats the raw image data into a data flow having a raster-likeformat, such that it has a time order suitable for scanning across thedisplay array 30. Then the driver controller 29 sends the formattedinformation to the array driver 22. Although a driver controller 29,such as a LCD controller, is often associated with the system processor21 as a stand-alone Integrated Circuit (IC), such controllers may beimplemented in many ways. They may be embedded in the processor 21 ashardware, embedded in the processor 21 as software, or fully integratedin hardware with the array driver 22.

The array driver 22 receives the formatted information from the drivercontroller 29 and reformats the video data into a parallel set ofwaveforms that are applied many times per second to the hundreds andsometimes thousands of leads coming from the display's x-y matrix ofpixels.

In one example, the driver controller 29, array driver 22, and displayarray 30 are appropriate for any of the types of displays describedherein. For example, driver controller 29 is a conventional displaycontroller or a bi-stable display controller (for example, aninterferometric modulator controller). In another example, array driver22 is a conventional driver or a bi-stable display driver (for example,an interferometric modulator display). Driver controller 29 may beintegrated with the array driver 22. Such is common in highly integratedsystems such as cellular phones, watches, and other small area displays.In yet another example, display array 30 is a display array or abi-stable display array (for example, a display including an array ofinterferometric modulators).

The input device 48 allows a user to control the operation of theexemplary display device 40. Input device 48 may include a keypad, suchas a QWERTY keyboard or a telephone keypad, a button, a switch, atouch-sensitive screen, or a pressure- or heat-sensitive membrane. Inone example, the microphone 46 is an input device for the exemplarydisplay device 40. When the microphone 46 is used to input data to thedevice, voice commands may be provided by a user for controllingoperations of the exemplary display device 40.

Power supply 50 can include a variety of energy storage devices as arewell known in the art. For example, power supply 50 may be arechargeable battery, such as a nickel-cadmium battery or a lithium ionbattery. In another example, power supply 50 is a renewable energysource, a capacitor, or a solar cell including a plastic solar cell, andsolar-cell paint. In another example, power supply 50 is configured toreceive power from a wall outlet.

In some examples, control programmability resides, as described above,in a driver controller which can be located in several places in theelectronic display system. In some examples, control programmabilityresides in the array driver 22. The above-described optimizations may beimplemented in any number of hardware and/or software components and invarious configurations.

The details of the structure of interferometric modulators that operatein accordance with the principles set forth above may vary widely. Forexample, FIGS. 7A-7E illustrate five different embodiments of themovable reflective layer 14 and supporting structures. FIG. 7A is across section of FIG. 1, where a strip of metal material 14 is depositedon orthogonally extending supports 18. In FIG. 7B, the moveablereflective layer 14 is attached to supports at the corners only, ontethers 32. In FIG. 7C, the moveable reflective layer 14 is suspendedfrom a deformable layer 34, which may include a flexible metal. Thedeformable layer 34 connects, directly or indirectly, to the substrate20 around the perimeter of the deformable layer 34. These connectionsare herein referred to as support posts. FIG. 7D shows support postplugs 42 upon which the deformable layer 34 rests. The movablereflective layer 14 remains suspended over the gap, as in FIGS. 7A-7C,but the deformable layer 34 does not form the support posts by fillingholes between the deformable layer 34 and the optical stack 16. Rather,the support posts are formed of a planarization material, which is usedto form support post plugs 42. The device illustrated in FIG. 7E isbased on FIG. 7D, but may also be adapted to work with any of thevariations illustrated in FIGS. 7A-7C. As shown in FIG. 7E, an extralayer of metal or other conductive material has been used to form a busstructure 44. This allows signal routing along the back of theinterferometric modulators, eliminating a number of electrodes that mayotherwise have had to be formed on the substrate 20.

As shown in FIG. 7, the interferometric modulators may function asdirect-view devices, in which images are viewed from the front side ofthe transparent substrate 20, the side opposite to that upon which themodulator is arranged. In these examples, the reflective layer 14optically shields the portions of the interferometric modulator on theside of the reflective layer opposite the substrate 20, including thedeformable layer 34. This allows the shielded areas to be configured andoperated upon without negatively affecting the image quality. Suchshielding allows the bus structure 44 in FIG. 7E, which provides theability to separate the optical properties of the modulator from theelectromechanical properties of the modulator, such as addressing andthe movements that result from that addressing. This separable modulatorarchitecture allows the structural design and materials used for theelectromechanical aspects and the optical aspects of the modulator to beselected and to function independently of each other. Moreover, theexamples shown in FIGS. 7C-7E have additional benefits deriving from thedecoupling of the optical properties of the reflective layer 14 from itsmechanical properties, which are carried out by the deformable layer 34.This allows the structural design and materials used for the reflectivelayer 14 to be optimized with respect to the optical properties, and thestructural design and materials used for the deformable layer 34 to beoptimized with respect to desired mechanical properties.

Some applications may include a large display (for example, a largerectangular display of greater than about 14 inches by 16 inches fortelevision or multimedia applications) that may be viewed well inconditions of reduced ambient illumination. For such applications,reflective displays such as described above with respect to FIGS. 1through 7 may not work well because reflective displays might include afrontlight, and the frontlight performance of the reflective display maysuffer when applied to large diagonal screens (for example, due to alack of uniform light distribution across the display). There arevarious ways to apply frontlight to a reflective-type interferometricmodulator display, but such frontlights may be inefficient and diminishthe perceived performance of the display.

Certain embodiments described below provide a transmissive backlitinterferometric modulator or backlit interferometric modulator displaycomprising a plurality of interferometric modulator structures. In oneembodiment the backlit display includes a backlight and an array oftransmissive interferometric modulator structures, each interferometricmodulator comprising a fixed and a moving optical stack. Thetransmissive interferometric modulators cause light within the desiredwavelength range to be transmitted while absorbing at least a portion ofthe remaining light. Embodiments relating to a transmissiveinterferometric modulator display may be incorporated in a displayapplication such as described above with regard to FIGS. 1 through 7E.

One embodiment of a stack of optical films within a transmissiveinterferometric modulator 54 is illustrated in FIG. 8. MEMS structuressuch as those shown in FIGS. 1-7 that incorporate the optical films arenot shown for clarity. FIG. 8 is a cross section diagram of thetransmissive interferometric modulator 54 comprising a fixed opticalstack (fixed transmissive layer) 55 and a moving optical stack (movingtransmissive layer) 57 separated by a gap 62 (for example, an air gap,partial vacuum, dielectric fluid or other gas, etc.). As illustrated inFIG. 8, the fixed optical stack 55 includes a transparent substrate 56A,which can include glass and a 35 nm silver layer 60A. The moveableoptical stack 57 includes a 35 nm silver layer 60B, a transparentelectrode layer 58, and a transparent substrate layer 56B, which, liketransparent substrate 56A may include glass.

In operation, a pixel of the transmissive interferometric modulatordisplay is in either a bright or a dark state. A light sourceilluminating the display element and a user of the display element (notshown) may be located on different sides of the display element. In thebright (“on” or “open”) state, the display element transmits a largeportion of incident visible light to the user in the desired wavelengthrange. When in the dark (“off” or “closed”) state, the display elementsblock substantially all light to the user. Depending on the embodiment,the light transmission properties of the “on” and “off” states may bereversed. In some embodiments MEMS pixels are configured to transmitpredominantly at selected colors, allowing for a color display inaddition to black and white.

In some embodiments, an interferometric modulator display includes arow/column array of these transmissive interferometric modulators. Eachinterferometric modulator includes a pair of transmissive layerspositioned at a variable and controllable distance from each other toform a resonant optical gap with at least one variable dimension. In oneembodiment, one of the transmissive layers may be moved between twopositions. In the first position, referred to herein as the relaxedposition, the movable transmissive layer is positioned at a relativelylarge distance from a fixed transmissive layer. In the second position,referred to herein as the actuated position, the moveable transmissivelayer is positioned more closely adjacent to the fixed transmissivelayer. Incident light that transmits through the two layers interferesconstructively or destructively depending on the height of the gapbetween the fixed and movable layers, producing either an overalltransmissive or non-transmissive state for each pixel in a desiredwavelength range. A pixel passes light of a particular wavelength rangein the transmissive state and blocks substantially all visible lightover the same wavelength range in the non-transmissive state. In certainembodiments the movable transmissive layer may move to a third positionother than the relaxed position and the actuated position.

In the transmissive interferometric modulator 54, the movabletransmissive layer 57 in a relaxed position is at a predetermineddistance from the fixed transmissive layer 55. The transmissive layers55 and 57, as referenced herein, may be formed from a variety ofmaterials that are partially transparent such as various dielectricsand/or transparent conductive oxides (for example, ITO). In someembodiments, the transmissive layers 55 and 57 are formed fromtransparent dielectrics.

The transmissive layers 55 and 57 are operatively coupled to electrodesthat provide for electrostatic actuation to vary the distance betweentransmissive layers 55 and 57. In some embodiments the transmissivelayers 55 and 57 are operatively connected to ring-shaped electrodes(not shown), where the electrodes surround the transmissive layers 55and 57. For example, in an embodiment similar to that shown in FIG. 7B,the movable element 14 may include transmissive layers 55 and 57 in thecenter of the pixel, while the ring-shaped electrodes near the postsprovide for electrostatic actuation. The electrodes may includeelectrically conductive material, for example, metal or metal oxide. Theelectrodes may be shaped similarly and aligned with each other such thatthe electrodes attract each other under electrostatic forces. In anexemplary embodiment a display includes an array of interferometricmodulators deposited on the back side (with respect to a viewer) of asubstantially transparent substrate.

In one embodiment, the electrodes include electrically conductivematerial, for example, light absorbing metal or metal oxide. Theelectrodes may include substantially transparent metal or metal oxide,for example, zinc oxide or ITO. The electrodes may be shaped similarlyand aligned with each other such that the electrodes attract each otherunder electrostatic forces. The electrodes may be ring-shaped such thatlight transmitted through the transmissive layers can pass through acenter transmissive portion surrounded by the electrodes. The centertransmissive portion defines the optically active area of one exemplarytransmissive interferometric modulator, which is the area of theinterferometric modulator where incident light is interferometricallymodulated by the movable and fixed transmissive layers. The remainder ofthe interferometric modulator display is referred to as a non-activearea. Electrode configurations other than ring-shaped may also be usedfor the electrodes.

The transmissive layers 55 and 57 and the electrodes may be fabricated,for example, by depositing one or more of the above layers onto atransparent substrate. Each layer can be formed of one or more layers ofmaterials and can be formed of a single material or a combination ofmaterials.

The movable electrode may be connected to a supporting structure invarious ways. For example, in some embodiments the corners of theelectrode may be attached to supports through tethers.

With no applied voltage differential across the electrodes, a gapremains between the movable transmissive layer 55 and fixed transmissivelayer 57. However, when a potential difference is applied across theelectrodes, electrostatic forces pull the electrodes together. If thevoltage is high enough, the tether is deformed and the moveableelectrode is forced against the fixed electrode, so that the movabletransmissive layer 57 which moves along with the electrode is thusforced against the fixed transmissive layer 55. The behavior is the sameregardless of the polarity of the applied potential difference.Therefore, the combination of two partially transmissive layersseparated by an air gap may be used to pass light within a wavelengthrange while absorbing light outside the range.

In one embodiment the display is configured to recycle at least aportion of the light emitted from the backlight. For example, lightincident on non-active areas of the pixel from the backlight may bereflected back to the backlight by a reflective black mask. Lightincident on active areas of the pixel from the back light may bereflected by one or more of the two transmissive layers 55 and 57 andmay re-enter the backlight. The back-reflected light can be recycled andcan enter the array of interferometric modulators for a second time inan active area.

FIG. 9A is a graph 64A illustrating simulated transmittance 66A as afunction of wavelength of the interferometric modulator of FIG. 8 whenthe interferometric modulator is in the bright state. In the brightstate the movable layer in the interferometric modulator is in the “up”position. As shown, this embodiment achieves maximum transmittance 68 oflight between 600 nm and 700 nm.

FIG. 9B is a graph 64B illustrating simulated transmittance 66B as afunction of wavelength of the interferometric modulator of FIG. 8 whenthe interferometric modulator is in the “dark” state. In the dark statethe movable layer in the interferometric modulator is in the “down”position. As illustrated, when the interferometric modulator is in thedark state, substantially all visible light is blocked. In someembodiments “substantially all” includes greater than 90% of lightincident on the substrate. In some embodiments “substantially all”includes greater than 95% of light incident on the substrate. In someembodiments “substantially all” includes greater than 98% of lightincident on the substrate. In some embodiments “substantially all”includes greater than 99% of light incident on the substrate.

Another embodiment of a transmissive interferometric modulator 74 isillustrated in FIG. 10. The transmissive interferometric modulator 74includes two optical stacks 75, 77 separated by a gap 82 (for example,an air gap). The fixed optical stack 75 includes a substrate layer 76A,a silver layer 80A, and an SiO₂ layer 78A. The movable optical stack 77includes a substrate layer, 76B, a silver layer 80B and an SiO₂ layer78B. In each optical stack the silver layer 80A, 80B borders the air gap82 and the SiO₂ layer 78A, 78B is sandwiched between the silver layer80A, 80B and the substrate 76A, 76B. In the illustrated embodiment ofFIG. 10, each of the SiO₂ layers 78A, 78B has a thickness of 94 nm andeach of the silver layers 80A, 80B has a thickness of 35 nm.

FIG. 11A is a graph 84A illustrating modeled transmittance 86A of thetransmissive interferometric modulator shown in FIG. 10. The modeledembodiment of FIG. 10A has two optical stacks, each of which includes asubstrate layer, a silver layer and an SiO₂ layer. As noted above withrespect to FIG. 10, each silver layer has a thickness of approximately35 nm and each SiO₂ layer has a thickness of approximately 94 nm. Theillustrated modeled transmittance shown in FIG. 11A occurs when the airgap is approximately 3000 Å. A maximum transmittance 88A occurs atapproximately 700 nm wavelength.

FIG. 11B is a graph 84B illustrating modeled transmittance 86B of thetransmissive interferometric modulator of FIG. 10 when the air gap isapproximately 250 Å. A maximum transmittance 88B occurs at approximately600 nm wavelength.

FIG. 11C is a graph 84C illustrating modeled transmittance 86C of theinterferometric modulator of FIG. 10 when the air gap is approximately150 Å, in the “down” state. As illustrated, substantially all incidentlight is blocked and thus, very little of the incident light istransmitted.

FIG. 11D is a modeled color plot (“color space chromaticity diagram”) 90illustrating the achievable color spectra for the embodiment of FIG. 10.Within the outer curved boundary 94 are all of the colors visible to theaverage person, also known as the gamut of human vision. Within thegamut of human vision are points 92A, 92B and 92C corresponding to thecolors green, red and blue respectively. Line 96 depicts the modeledspectral reflectance for the embodiment of the transmissiveinterferometric modulator of FIG. 10 for varying gap distances.

FIG. 12A is a graph 104A illustrating modeled transmittance plot 106A ofa transmissive interferometric modulator similar to the embodiment shownin FIG. 10. The transmittance graph 104A is based on an embodiment thathas two optical stacks, each of which includes a substrate layer, asilver layer and an SiO₂ layer. Different from the embodiment of FIG.10, each of the silver layers in the embodiment responsible for themodeled graph of FIG. 12A has a thickness of 20 nm. The thickness of theSiO₂ layers remains 94 nm. The illustrated modeled transmittance plot106A of the embodiment of FIG. 12A occurs when the air gap has athickness of approximately 3000 Å. A maximum transmittance 108A for thisembodiment of a transmissive interferometric modulator occurs at awavelength of slightly greater than 700 nm.

FIG. 12B is a graph 104B illustrating modeled transmittance plot 106B ofthe embodiment responsible for the modeled graph of FIG. 12A(configuration as depicted in FIG. 10 but with 20 nm Ag layers 80A, B,and 94 nm SiO2 layers 78A, B) when the air gap is approximately 250 Å. Amaximum transmittance 108B of the transmissive interferometric modulatoroccurs at a wavelength of slightly greater than 600 nm.

FIG. 12C is a graph 104C illustrating modeled transmittance plot 106C ofthe interferometric modulator as depicted in FIG. 10 but with 20 nm Aglayers 80A, B, and 94 nm SiO2 layers 78A, B when the air gap isapproximately 150 Å, in the “down” state. As illustrated, substantiallyall incident light is blocked and thus, very little of the incidentlight is transmitted over the range of wavelengths shown.

FIG. 12D is a color space chromaticity diagram 110 illustrating thesimulated achievable color spectra for the embodiment that created themodeled transmission graph of FIG. 12A (configuration as depicted inFIG. 10 but with 20 nm Ag layers 80A, B, and 94 nm SiO2 layers 78A, B).Within the outer curved boundary 114 are all of the colors visible tothe average person, also known as the gamut of human vision. Within thegamut of human vision are color points 112A, 112B and 112C correspondingto the colors green, red and blue respectively. Line 116 depicts themodeled spectral reflectance for the embodiment of the transmissiveinterferometric modulator used to create the graph 104A of FIG. 12A forvarying gap distances.

FIG. 13 is another embodiment of a transmissive interferometricmodulator 124 comprising two optical stacks 125, 127 separated by an airgap 132. The fixed optical stack 125 includes a substrate layer 126A andalternating layers of SiC 130A, 130B, and MgF₂ 128A, 128B. The movableoptical stack 127 includes a substrate 126B and alternating layers ofSiC 130C, 130D and MgF₂ 128C, 128D. In this embodiment, each opticalstack 125, 127 has two layers of SiC and two layers of MgF₂ disposed ona substrate such that each optical stack has a layer of SiC (130B 130Crespectively) that borders the air gap 132. As illustrated, each SiClayer 130A, 130B, 130C, 130D has a thickness of 52 nm and each MgF₂layer 128A, 128B, 128C, 128D has a thickness of 99 nm.

FIG. 14A is a graph 134A illustrating simulated transmittance plot 136Aof the interferometric modulator of FIG. 13 when the air gap 132 isapproximately 2000 Å. A maximum transmittance 138A (approximately 1.0,100% transmission) occurs at a wavelength of approximately 450 nm. Forthe range of wavelengths between 500 nm and 700 nm approximately allincident light is blocked.

FIG. 14B is a graph 134B illustrating simulated transmittance plot 136Bof the interferometric modulator of FIG. 13 when the air gap 132 isapproximately 1000 Å. A maximum transmittance 138B (approximately 1.0)occurs at wavelengths just below 800 nm. For the range of wavelengthsbetween 450 nm and 650 nm approximately all incident light is blocked.

FIG. 14C is a graph 134C illustrating simulated transmittance plot 136Cof the interferometric modulator of FIG. 13 when the air gap 132 isapproximately 500 Å. A maximum transmittance 138C (approximately 1.0)occurs at wavelengths just below 700 nm. For the range of wavelengthsbetween 450 nm and 600 nm approximately all incident light is blocked.

FIG. 14D is a simulated color space chromaticity diagram 140illustrating the achievable color spectra for the embodiment of FIG. 13.Within the outer curved boundary 144 are all of the colors visible tothe average person, also known as the gamut of human vision. Within thegamut of human vision are color points 142A, 142B, 142C corresponding tothe colors green, red and blue, respectively. Line 146 represents themodeled spectral reflectance of the transmissive interferometricmodulator 124 of FIG. 13 for varying gap distances.

Projection IMOD

Projection display systems may include IMOD modulators. The attributesof the projection displays may be particularly adapted to the IMODcharacteristics.

Two common spatial light modulators (SLMs) in use today are liquidcrystal displays (LCDs) and digital micromirror devices (DMDs). Thereare several different types of LCDs in use while the DMD™ is a uniquedevice provided by Texas Instruments, Inc. Three types of common LCDsare transmissive, which are based on two glass panes, reflective, whichare based on two glass panes, and reflective, which are based on a glasspane bonded to a silicon substrate. The latter reflective types arenormally referred to as a liquid crystal on silicon (LCOS) devices.

All liquid crystal devices suffer from light-throughput inefficiency dueto (1) use of polarized light, (2) realities of low aperture ratiosand/or (3) inherently low optical transmissions of materials used tocreate the parallel-plate LCD structure. Further, the response time ofLCD materials, although continually improving, can be slow relative tovideo speeds. The Texas Instruments device mentioned above hasadvantages including both an inherently higher optical throughput and afast response time. Thus, it can be made on silicon substrates and thedevice may be small to keep costs low. This leads to low apertureratios. Also, the most common DMD-based products use one device in acolor field sequential fashion to avoid having to use three devices tomodulate separate red, green and blue channels. The above factors leadto illumination inefficiencies on the order of those found in LCD-basedprojectors. In fact, when viewing competing LCD and DMD products,performances of each are found to be generally the same. The performanceof each is deemed adequate and sales of both products are strong.

Nevertheless, it can be desirable to lower the cost of these modulators,lower the cost of the entire projection system and reduce powerconsumption. Each of these goals can be accomplished if the illuminationsystems were more efficient.

As mentioned above, costs have been lowered by using single devices(Texas Instruments) and keeping LCD sizes small (various manufacturers).These approaches limit performance, but run counter to a goal oflowering power consumption. Additionally, there has been extensiveinnovation in projector architecture. Unfortunately, new architecturesmay include extensive retooling costs to yield only marginal performancegains.

FIGS. 15-18 show four different approaches to integrating an IMOD deviceinto reflective and transmissive projection systems. FIGS. 19A-19Dillustrate four alternative approaches amenable to the use of an IMODmodulator in a transmissive projection system. The system may be of oneof the types illustrated in FIGS. 15-18 and discussed below. The IMODarchitecture can be fairly agnostic to architectural configurationwithin the system. This can be an advantage since current modulatortypes prefer a particular architecture over another. Thus, in someembodiments the IMOD device is operated either in an area modulationscheme (such as that used in direct-view IMOD displays) or a pulse widthmodulation scheme (such as that used by the DMD) to achieve gray scale.

FIG. 15 illustrates a transmissive IMOD projection device 200. Thedevice 200 includes a light source 202 configured to propagate lightthrough a transmissive interferometric modulator (“IMOD”) 204 and aseries of lenses. In some embodiments the light source 202 is a lamp. Asillustrated in FIG. 15, light from the light source 202 passes through afirst lens 206A and a second lens 206B before entering the back of thetransmissive IMOD 204. After passing through the transmissive IMOD 204the light passes through a third lens 206C and a fourth lens 206D. Thetransmissive IMOD 204 is placed at the back focal plane of thecombination of lenses 206A and 206B, which corresponds to the Fouriertransform plane of the combination of lenses 206A and 206B. Thus, in theillustrated embodiment of FIG. 15, the first lens 206A and the secondlens 206B produce an illumination pattern on the transmissive IMOD 204that corresponds to the Fourier transform of the light source 202. Thus,a light source 202 that is effectively a point source, for example,would advantageously produce a uniform illumination pattern on the IMODarray 204. The Fourier transform of the light distribution of the lightsource 202 is transmitted through the transmissive IMOD 204, whichmodulates the light distribution. The modulated light distributionpropagates through lenses 206C and 206D, which are disposed to image thetransmissive IMOD 204 onto a projection screen for viewing. In thisembodiment the third and fourth lenses, 206C and 206D, are alsoconfigured provide an inverted image of the IMOD 204 on the projectionscreen.

FIG. 16 illustrates a top plan view of another transmissive IMODprojection device 220. The device 220 includes a light source 222,transmissive IMODs 224A, 224B, 224C lenses 226A, 226B, 226C, dichromaticfilters 228A, 228B and mirrors 230A, 230B, 230C. In operation, light ispropagated from the light source 222 and is split by wavelength by afirst dichroic filter 228A. In the illustrated embodiment, red lightpasses through the first dichroic filter 228A, which light then strikesfirst mirror 230A and is reflected to first transmissive IMOD 224A.Green and blue light are reflected by the first dichroic filter 228A toa second dichroic filter 228B. Green light is reflected by seconddichroic filter 228B and into second transmissive IMOD 224B. Blue lightpasses through the second dichroic filter 228B and then passes throughfirst lens 226A before being reflected first by second mirror 230B andthen reflected by third mirror 230C before entering third transmissiveIMOD 224C.

The red light passing through first transmissive IMOD 224A, the greenlight passing through second transmissive IMOD 224B and the blue lightpassing through third transmissive IMOD 224C are all recombined incombiner cube 232. Light exiting the combiner cube 232 is inverted andbrought to focus by the lens group comprised of second lens 226B andthird lens 226C. In some embodiments a combiner cube 232 uses a colorrotator architecture of the type disclosed in U.S. Patent ApplicationPublication No. 2005/0157265, which is hereby incorporated by referencein its entirety. The color rotator architecture uses a plurality oftransparent cubes separated by polarization rotating films or notchfilms to combine the components of red, green and blue light into whitelight exiting the combiner cube 232. In some embodiments the transparentcubes are coated with an antireflection coating. FIG. 19A is anisometric projection view illustrating a color rotator architecture 300.

In some embodiments the individual red, green, and blue color beams arecombined in the temporal domain rather than the geometric domain by useof a rotating prism cube of the type disclosed in U.S. Pat. No.5,416,514, which is hereby incorporated by reference in its entirety.The prism assembly has four equal flat sides and is rotated about itscentral longitudinal axis. The rotation of the prism assembly causesred, green and blue band of colors to be scanned downwardly (orupwardly) in a sequential manner by refraction. FIG. 19B is a side planview illustrating this type of rotating prism assembly architecture 310.

In some embodiments, temporal combining is accomplished through the useof a rotating disk architecture to combine red, green and blue light.Some types of rotating disk architecture are disclosed in U.S. Pat. No.6,870,581, which is hereby incorporated by reference in its entirety.FIG. 19C is an elevational side view illustrating a rotating diskarchitecture 320. As illustrated, the rotating disk architecture 320 hasa disk with an axle that allows the disk to spin. The element spins fastenough to cause red, blue and green color bands to sweep so rapidlyacross the viewing plane that the viewer perceives no motion artifacts,and the displayed colors appear to be fully combined, even though theindividual beams are out of phase with each other.

In some embodiments, a combiner cube 232 uses a color prismarchitecture. As with the architectures referenced above, the colorprism architecture is used to combine the red, green and blue light intowhite light exiting the combiner cube 232 in a single direction. Sometypes of color prism architecture are disclosed in U.S. PatentApplication Publication No. 2003/0081178, which is hereby incorporatedby reference in its entirety. FIG. 19D is a top plan view illustratingone type of color prism architecture 330.

FIG. 17 illustrates a top plan view of a reflective IMOD projectiondevice 240. The device 240 includes a light source 242 configured topropagate light through a polarizer 244 and into a polarizing beamsplitter 250. The polarized light enters the polarizing beam splitter250 and is reflected out of the beam splitter to a ¼ wave plate 248. Thepolarized light is partially rotated by the ¼ wave plate then strikesand reflects from the IMOD 252. The light passes through the ¼ waveplate a second time and then moves on into the polarizing beam splitter.Having undergone two ¼ wave rotations and a reflection at the IMOD thelight passes directly through and out of the beam splitter 250. A lensgroup including a first lens 246A and a second lens 246B inverts andbrings to focus the light exiting the projection device 240.

FIG. 18 illustrates a side plan view of one embodiment of a rising frontIMOD projection device 260. Light is propagated from a light source 262and reflected off of a reflective IMOD 264 towards a lens groupincluding a first lens 266A and a second lens 266B configured to invertand focus the light as it exits the device 260.

Since the divergence angle of the illumination source can be controlledin a projector (as opposed to the situation in a direct view displayilluminated by ambient light) there may be no requirement to affixdiffusing films to IMOD displays used for projection. In fact, the colordependence of the IMOD over incident light angle can be exploited in theprojection situation. Very narrow beams can lead to highly saturatedcolors, and broader beams can lead to brighter, less saturated colors.The systems designer can make trade-offs based on this situation. Thisis a different situation than in current projectors where wider anglebeams can also lead to brighter colors albeit at the expense of lowercontrast ratios and deteriorating black levels.

Transmissive IMOD displays can be especially effective, since projectionsystems discriminate against the type of front surface reflections thatchallenge the design of direct view displays that might utilizetransmissive IMOD SLMs.

The low cost of IMOD SLMs fabricated on large sheets of glass offeranother design advantage. Not limited by cost to very small sizes (asare the DMD and LCOS devices), larger panels can be used to exploitarea-modulation in order to achieve high bit depths beyond the reach ofcompeting technology.

Since the IMOD begins with an optical stack, fabrication economies canbe introduced. Most projectors have a cold mirror in the illuminationoptical system to avoid transferring unnecessary heat to the SLM. Insome embodiments the cold mirror may be fabricated as part of the frontsurface of the IMOD to reduce parts count in the final projectorassembly.

In the projection application the IMOD has no significant SLM sizerestriction. Smaller SLMs usually lead to smaller projection systems,but extreme smallness has no particular advantage in large projectionsystems. The IMOD SLM can be size adapted to every application. Thisallows optimal performance in every application.

An IMOD can trade-off color performance without direct and strong impacton contrast ratio performance.

An IMOD has the possibility of both area-array and pulse widthmodulation. This allows the device to be optimized for both high powerand low power application.

Dielectric Interferometric Modulators for Large Screen Displays

Large screen IMOD display devices may be used in connection withtelevision and computer monitors. In some embodiments these devices areconnected to mains service (100-110 VAC or greater than 200V—forexample, in the United Kingdom or Europe), thus power is of minimalconcern relative to the constraints applied to portable, battery-powereddevices. In some embodiments the displays may use pulse-width-modulationtechnique to achieve grey scale. In some embodiments thepulse-width-modulation drive requires short frame time and/or highlyconductive row and column traces. In some embodiments the devices areback-lit devices. In some embodiments the devices include transmissiveIMODs with multi-layer film stacks.

In some embodiments an IMOD can use two dielectric mirrors (instead ofmetallic mirrors) to transmit at each pixel a selected color band whilereflecting all other wavelengths. An array of these modulator elementscan be used with a co-designed backlight to form a transmissive backlitdisplay.

Large, direct-view displays are almost universally self-emissive orbacklit. Such displays, especially those designed for televisionapplications, are often viewed in conditions of reduced ambientillumination. This puts reflective displays at a disadvantage in theseapplications because reflective displays may include frontlights, andfrontlight performance suffers when applied to large diagonal screens.There are ways to backlight a reflective IMOD display, but they tend tobe inefficient and diminish the perceived performance of the IMOD.

There are various current backlight approaches for reflective IMODs. Afirst approach involves placing inward facing reflectors on a frontsurface of the IMOD substrate and illuminating the inward facingreflectors by forcing light from behind a backplate through smallapertures around the IMOD pixels. Such light can then be reflected ontothe pixels. This approach can probably only illuminate the edge of thepixels. It can be inefficient and lead to a visible “coring” effect.

A second approach involves placing back-facing emitters on the frontsurface of the IMOD substrate. This can be logistically complex, canhurt the IMOD optical performance, and may still not result in afavorable viewing experience.

There are also methods of using the IMOD structures (such as the supportposts) to pipe light form the back to the front of the IMOD, but allsuch approaches compromise the design.

FIG. 20 illustrates a cross section side view of one embodiment of alarge screen display 350 including a backside buss 354 and a transparentsubstrate 356. In some embodiments the transparent substrate 356comprises glass. As illustrated in FIG. 20 one or more high posts 358connect the transparent substrate 356 and the backside buss 354. One ormore stationary optical stacks 360 are disposed on the transparentsubstrate 356, between the transparent substrate 356 and the backsidebuss 354. One or more movable optical stacks 362 are also positionedbetween the transparent substrate 356 and the backside buss 354.Attachment rings 364 on the one or more movable optical stacks 362connect to lower posts 366, which are attached to the transparentsubstrate 356. As shown in FIG. 20 the current reflecting mirror in anarchitecture similar to those illustrated in FIGS. 7A-7E can be replacedwith a dielectric mirror 354. In some embodiments the optical stacks aremodified to comprise a single and more complex optical stack. Theresultant combination of two optical stacks separated by an air gap canbe combined to pass one wavelength band while reflecting all otherwavelengths.

The mechanical layer from the architecture similar to those illustratedin FIGS. 7A-7E serves its usual purposes of supporting the mirror andproviding a spring restoring force. Also, this layer covers part of thedielectric mirror to form a conductive electrode that can be attractedby a similarly shaped electrode on the substrate. In some embodimentsthe electrodes are ring-shaped. In other embodiments the electrodes arenot ring-shaped.

As in conventional IMODs, the optical stacks (the one or more stationaryoptical stacks 360 and the one or more movable optical stacks 362) aredesigned so that as the two dielectric stacks are pulled together theresonant wavelength moves out of the visible spectrum—rendering themirror black to the viewer's eye. The combination of the one or morestationary optical stacks 360 and the one or more movable optical stacks362 may create a color resultant from that particular pixel. Both theone or more stationary optical stacks 360 and the one or more movableoptical stacks 362 may include clear center apertures with conductiveouter rings masking an area around the clear aperture. The outer ringsserve as electrodes to pull the movable optical stack 362 close to thestationary optical stack 360 through electrostatic attraction. Thebackside buss 354 is configured to provide high conductivity. In someembodiments a frontside buss may be included because a significant areais given up to the electrodes, posts, and busses.

FIG. 21 illustrates a cross section side view of another embodiment of alarge screen display 370. The large screen display 370 includes abacklight 374, a back transparent layer 376 and a front transparentlayer 378. In some embodiments the back transparent layer 376 and thefront transparent layer 378 comprise glass. One or more stationaryoptical layers 380 are disposed on the front transparent layer 378. Oneor more moving optical layers 382 are connected to each other byattachment rings 384. Posts connect the back transparent layer 376 tothe front transparent layer 378. In FIG. 21 an absorbing black mask 390is shown disposed on the front transparent layer 378 to improve contrastratio, and a reflective black mask 392 is shown disposed on the backtransparent layer 376 to keep light entering the back of the IMOD fromthe backlight from reaching non-active areas of the pixel. Thereflective nature of the reflective black mask 392 increases recyclingof the light.

In some embodiments the front transparent layer 378 is completely maskedoff with an absorbing black mask configured to keep spurious light fromboth entering non-active regions from the front and to prevent lightthat has entered these regions from exiting to the front. In someembodiments the reflective black mask 392 is configured to assure onlylight from the backlight enters the active area of the pixels. In someembodiments the backlight 374 is a recycling backlight to compensate forlimitations in the percent active area display. In some embodiments thebacklight 374 is configured to provide light that does not hit an activearea. In some embodiments the backlight 374 is configured to providelight that hits an active area and/or that selects against thewavelength of said light re-enters the backlight and has the chance tobe reflected and enter the IMOD for a second time. Eventually, thislight has a chance of hitting a proper active area. Such a back light isillustrated in FIG. 22.

FIG. 22 illustrates a cross-section side view of another embodiment of alarge screen display 400 comprising an optical stack 402. The opticalstack 402 includes a reflector layer 404, a light guide plate 406disposed over the reflector layer 404 and an angle turning film 408disposed over the light guide plate 406. The light guide plate has beendesigned to emit light from its top surface toward the angle turningfilm, The reflector layer 404 provides recycling of light that has beenreflected from the IMOD 414 and redirection of any light that has beenscattered from the top surface of the light guide plate 406 Light passesfrom the reflector layer 404, through the light guide plate 406 and theangle turning film 408 and then crosses a gap 410 before entering abrightness film 412. The brightness film 412 is configured to collimatelight and help with light recycling. Light passing through thebrightness film 412 then enters the transmissive IMOD 414 before exitingthe large screen display 400.

In FIG. 23 a top plan view of a pixel layout 420 is illustrated in moredetail. The pixel layout 420 includes a moving optical stack 422, aplurality of posts 424 and an electrode ring 426. The electrode ring 426includes an aperture 428 in a center of the electrode ring 426. Aflexible mechanical layer connects the moving optical stack 422 to theplurality of posts 424. The mechanical layer is patterned on the back ofthe moving optical stack 422 to form the electrode ring 426. A similarelectrode ring may be patterned on the substrate. In some embodimentsdielectric mirrors can be close-packed, the electrode portions can bemade as small as possible, and pulse width modulation can be used creategrayscale. The high speeds of pulse width modulation may include highconductance row and column traces, so back-side bussing can be used. Thebackplate can be applied directly to the highest layer of posts used tosupport the backside buss leads. This leaves a very smallinter-substrate gap which allows the structure to be assembled with areflowed metal edge seal to achieve hermetic packaging.

Due to the “bulls-eye” nature of the pixels it may be desirable to aligna lenslet array with the pixels. In this case it could be preferable tomake the backplate and the lenslet array integral.

In preferred embodiments a backlit flat panel TV can be fabricated withmostly existing IMOD fabrication methods (which are relatively low incost). In some embodiments (such as those illustrated in FIGS. 20-23),two dielectric optical stacks may function to pass a preferredwavelength band in the visible spectrum when removed form each other andpass a band or multiple bands in spectral areas outside the visiblespectrum when proximate to each other. In some embodiments light that isnot passed, rather than being absorbed, is reflected back into thebacklight. In some embodiments the backlight is designed tostatistically recycle the right for reuse, or it can be explicitlydesigned to preferably reflect rejected light to neighboring pixels. Insome embodiments, instead of using a reflective mask on the back of anIMOD, a microlens array is used to converge incident light into theclear active aperture of the microlens array.

The foregoing description details certain embodiments. However, nomatter how detailed the foregoing appears in text, the teachingsdescribed herein can be practiced in additional ways. Use of particularterminology when describing certain features or aspects should not betaken to imply that the terminology is being re-defined herein to berestricted to including any specific characteristics of the features oraspects with which that terminology is associated. Further, numerousapplications are possible for devices of the present disclosure. It willbe appreciated that various modifications and changes may be madewithout departing from the scope of the invention. Such modificationsand changes are intended to fall within the scope of the invention, asdefined by the appended claims.

1. A device, comprising: a movable membrane including a partiallyreflective mirror; a substrate positioned on a first side of the movablemembrane; and a light source positioned on a second side of the movablemembrane and configured to emit light incident on the second side of themovable membrane, wherein the movable membrane is configured to movefrom a first position to a second position, wherein with the movablemembrane in the first position visible light of a desired wavelengthrange passes through the movable membrane and through the substrate, andwherein with the movable membrane in the second position substantiallyall of the visible light of the desired wavelength range is blocked. 2.The device of claim 1, wherein with the movable membrane in the secondposition at least 90% of visible light incident on the second side ofthe movable membrane is blocked.
 3. The device of claim 1, wherein withthe movable membrane in the second position the movable membrane definesat least in part an optical interference cavity configured to pass lightof desired wavelengths, and wherein the movable membrane includes anabsorber layer configured to absorb light of other wavelengths.
 4. Thedevice of claim 3, wherein the absorber layer includes a semiconductor.5. The device of claim 1 further comprising a mechanical layer includinga dielectric material.
 6. The device of claim 5, wherein the dielectricmaterial comprises at least one of SiN or SiO₂.
 7. The device of claim 5further comprising a thin layer of a metal disposed on top of thedielectric material.
 8. The device of claim 7, wherein the thin layer ofmetal comprises at least one of Au or Ag.
 9. The device of claim 1,wherein the substrate includes a transparent substrate.
 10. The deviceof claim 1, wherein the partially reflective mirror includes a flexible,silver-coated membrane.
 11. The device of claim 1 further comprising alens configured to focus light passing through the substrate and themovable membrane.
 12. A transmissive mechanical device, comprising: afirst optical stack separated by a gap from a second optical stack; alight source positioned on a first side of the first optical stack andconfigured to emit light through the first optical stack to the secondoptical stack; and a lens configured to focus light exiting the secondoptical stack, wherein the first optical stack includes at least onematerial with an index of refraction greater than 2 and at least onematerial with an index of refraction less than 1.3, and wherein thesecond optical stack includes a glass substrate, at least one materialwith an index of refraction greater than 2 and at least one materialwith an index of refraction less than 1.3.
 13. The transmissivemechanical device of claim 12, wherein within either the first opticalstack or the second optical stack a first material having a higherrelative index of refraction is positioned so as to sandwich a secondmaterial having a lower relative index of refraction.
 14. Thetransmissive mechanical device of claim 13, wherein a difference betweenthe index of refraction of the sandwiching layers and the middle layeris maximized.
 15. The transmissive mechanical device of claim 14,wherein at least one layer includes a dielectric.
 16. The transmissivemechanical device of claim 14, wherein at least one layer includes asemiconductor.
 17. The transmissive mechanical device of claim 14,wherein the thickness of each layer is greater than 25% of thewavelength of light incident on the substrate.
 18. A transmissivedisplay, comprising: a transparent substrate; a first reflecting layerdisposed on a first surface of the transparent substrate; a movablemembrane including a second reflecting layer, wherein the secondreflecting layer and the first reflecting layer form a variable opticalcavity; and a light source, wherein the movable membrane is positionedbetween the light source and the transparent substrate, and wherein thelight source is configured to emit light incident on the movablemembrane, wherein the variable optical cavity is adjusted as the movablemembrane moves from a first position to a second position, and whereinwhen the movable membrane is in the first position, the movable membraneallows transmission of wavelengths in the range of ultraviolet orinfrared light, and absorbs substantially the entire wavelength range ofincident visible light.
 19. The display of claim 18, wherein the firstreflecting layer includes a material with an index of refraction greaterthan 2.0.
 20. The display of claim 18, wherein the first reflectinglayer comprises at least one of Au, Ag or SiC.
 21. The display of claim18, wherein the entire wavelength of incident light is a particularwavelength.
 22. The display of claim 18, wherein when the movablemembrane is in the first position at approximately 300 nm a peaktransmission is approximately 650 nm.
 23. The display of claim 18,wherein when the movable membrane is in the second position a peaktransmission is approximately 450 nm.
 24. The display of claim 18further comprising a linear polarizer.
 25. The display of claim 18further comprising an optical isolator.
 26. The display of claim 18further comprising a lens configured to focus light exiting the movablemembrane.
 27. The display of claim 26, wherein the lens is configured tofocus light onto a pixel.
 28. The display of claim 26, wherein the lensincludes an array of lenses.